Double patterning CDU of 3σ=4.9nm before DoseMapper correction (Left)... | Download Scientific Diagram
ASML
OrthoChrome IMRT analysis
Dose Mapper - Advanced System for Correction of Critical Dimension (CD) Variations in Deep Sub Micron Technologies
Dose Map and Placement Co-Optimization for Timing Yield Enhancement and Leakage Power Reduction Kwangok Jeong, Andrew B. Kahng, Chul-Hong Park, Hailong. - ppt download
Dose Mapper - Advanced System for Correction of Critical Dimension (CD) Variations in Deep Sub Micron Technologies
Application of Dosemapper for 65-nm gate CD control: strategies and results - [scite report]
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Schematic of the Dose Mapper concept is shown. | Download Scientific Diagram
ASML
Schematic of the Dose Mapper concept is shown. | Download Scientific Diagram